Nano-Cracked Strain Sensor with High Sensitivity and Linearity by Controlling the Crack Arrangement
نویسندگان
چکیده
منابع مشابه
Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane
This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...
متن کاملHigh-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity
This paper presents the experimental evaluation of a new piezoresistive MEMS strain sensor. Geometric characteristics of the sensor silicon carrier have been employed to improve the sensor sensitivity. Surface features or trenches have been introduced in the vicinity of the sensing elements. These features create stress concentration regions (SCRs) and as a result, the strain/stress field was a...
متن کاملA Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics
This paper presents a fully integrated linear Hall sensor by means of 0.8 μm high voltage complementary metal-oxide semiconductor (CMOS) technology. This monolithic Hall sensor chip features a highly sensitive horizontal switched Hall plate and an efficient signal conditioner using dynamic offset cancellation technique. An improved cross-like Hall plate achieves high magnetic sensitivity and lo...
متن کاملHigh Sensitivity MEMS Strain Sensor: Design and Simulation
In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. The current sensor design employs different levels of signal amplifications. These amplificati...
متن کاملCrack opening analysis of complex cracked pipes
Based on the reference stress approach, two sets of the crack opening displacement (COD) estimation equations are proposed for a complex cracked pipe. One set of equations can be used for the case when full stressstrain data are known, and the other for the case when only yield and tensile strengths are available. To define the reference stress, a simple plastic limit analysis for the complex c...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2019
ISSN: 1424-8220
DOI: 10.3390/s19122834